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Beamline 6.3.1

Calibration and Standards, EUV/Soft X-Ray
Optics Testing, Solid-State Chemistry

Operational

Now

Source characteristics

Bend magnet

Energy range

500-2000 eV

Monochromator

VLS-PGM

Calculated flux (1.9 GeV, 400 mA)

1011 photons/s/0.01%BW at 1000 eV

Resolving power (E/DE)

5000

Endstations

Reflectometer

Characteristics

VLS-PGM monochromator with fixed exit slit and refocusing mirror; 2-circle goniometer with x, y, z, q sample mirror

Spatial resolution

Can position to 1 µm

Detectors

Si diode, CEM, MCP, total yield

Spot size at sample

5 x 200 µm

Samples

Format

Solid state, gas phase; foils, powders, etc.

Sample environment

High vacuum or UHV

Scientific applications

Solid-state chemistry to the Al and Si K edges, atomic physics reflectometry, scattering

Local contact/spokesperson

Name: Rupert Perera
Affiliation: Center for X-Ray Optics, Berkeley Lab
Phone: (510) 486-5680
Fax: (510) 486-7696
Email: rcperera@lbl.gov

Table of all beamlines