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Beamline 6.3.2Calibration and Standards; EUV Optics Testing;
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Operational |
Now |
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Source characteristics |
Bend magnet |
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Energy range |
50-1300 eV |
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Monochromator |
VLS-PGM |
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Calculated flux (1.9 GeV, 400 mA) |
1011 photons/s/0.01%BW at 100 eV |
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Resolving power (E/DE) |
7000 |
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Endstations |
Reflectometer |
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Characteristics |
2-circle goniometer with x, y, z, q movement of sample |
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Spatial resolution |
Can position to 1 µm, 0.002° |
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Detectors |
Photodiode, channeltron, and CCD camera on a rotating arm |
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Spot size at sample |
10 (v) x 300 (h) µm |
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Samples |
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Format |
Solid state, gas phase; foils, powders, films up to 20 cm in diamter |
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Sample environment |
High vacuum or UHV |
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Scientific applications |
Solid-state chemistry, gas phase, atomic physics reflectometry, scattering |
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Local contacts |
Name: Stan Mrowka Name: Ben Kaufmann |
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Spokesperson |
Name: Eric Gullikson |
Table of all beamlines