Operational

Now

Source characteristics

Bend magnet

Energy range

50-1000 eV

Monochromator

VLS-PGM

Calculated flux (1.9 GeV, 400 mA)

10¹¹ photons/s/0.01%BW at 100 eV

Resolving power (E/DE)

7000

Endstations

Scanning bright field and dark field mask inspection

Spot size at sample

2.5 x 4 µm

Local contacts

Name: Moonsuk Yi
Phone: (510) 486-4954
Email: msyi@lbl.gov

Name: Tsuneyuki Haga
Phone: (510) 486-5048
Email: thaga@lbl.gov

Spokespersons

Name: Jeffrey Bokor
Affiliation: Univ. of California, Berkeley;
Center for X-Ray Optics, Berkeley Lab
Phone: (510) 642-4134
Fax: (510) 642-2739
Email: jbokor@eecs.berkeley.edu

Name: David Attwood
Affiliation: Center for X-Ray Optics, Berkeley Lab
Phone: (510) 486-4463
Fax: (510) 486-495
Email: dtattwood@lbl.gov