Operational

See endstation tables

Source characteristics

8-cm-period undulator (U8)

Energy range

See endstation tables

Monochromator

See endstation tables

Endstations

EUV Interferometer (2 available)
Angle- and Spin-Resolved Photoemission (2002)

Beamline phone numbers

(510) 495-2120, (510) 495-2121

Operational

Now

Energy range

60–320 eV

Monochromator

VLS-PGM

Calculated flux (1.9 GeV, 400 mA)

~ 5 x 10¹³ photons/s/1%BW at 134 eV

Resolving power (E/DE)

200–10,000

Detectors

GaAsP flux monitor, silicon 1024 x 1024 CCD array

Samples

Preparation

All-reflective, multilayer-coated EUV optics

Sample environment

10^-7 or 10^-4 Torr O₂

Special notes

Interferometer stations also support different modes of high-resolution EUV pattern transfer capabilities

Scientific applications

Interferometric wavefront measurement of optics designed for EUV lithography

Local contacts

Name: Kenneth Goldberg
Phone: (510) 495-2261
Fax: (510) 486-4550
Email: kagoldberg@lbl.gov

Name: Patrick Naulleau
Phone: (510) 486-4529
Fax: (510) 486-4550
Email: pnaulleau@lbl.gov

Spokespersons

Name: Jeffrey Bokor
Affiliation: Univ. of California, Berkeley;
Center for X-Ray Optics, Berkeley Lab
Phone: (510) 642-4134
Fax: (510) 642-2739
Email: jbokor@eecs.berkeley.edu

Name: David Attwood
Affiliation: EUV/LLC
Phone: (510) 486-4463
Fax: (510) 486-4966
Email: attwood@eecs.berkeley.edu

Operational

2002

Energy range

20–320 eV

Monochromator

VLS-PGM, with two gratings (200 and 1200 lines/mm)

Calculated flux (1.9 GeV, 400 mA)

~ 5 x 10¹³ photons/s/1%BW at 134 eV

Resolving power (E/DE)

200–10,000

Detectors

Scienta SES 100 (angle-resolved photoemission) and Scienta SES 200 (spin-resolved photoemission)

Samples

Format

UHV-compatible solids

Preparation

Sample manipulator with five degrees of freedom; temperature control from 20 to 1500 K

Sample environment

UHV

Scientific applications

Angle- and spin-resolved photoemission

Local contact

Name: Alexei Fedorov
Phone: (510) 495-7521
Fax: (510) 486-4299
Email: avfedorov@lbl.gov

Spokesperson

Name: Dan Dessau
Affiliation: Univ. of Colorado at Boulder
Phone: (303) 492-1607
Fax: (303) 492-2998
Email: dessau@spot.colorado.edu