Operational

Now

Source characteristics

Bend magnet

Energy range

175 - 1500 eV

Monochromator

SGM

1800 at 800 eV

Endstations

MicroXPS

Characteristics

X-ray photoelectron spectroscopy study of
50 x 50 mm sample with 1 x 1 µm spot size

Spatial resolution

1 x 1 µm

Detectors

Electron energy analyzer

Spot size at sample

1 x 1 µm

Samples

Format

UHV-compatible solids up to 50 x 50 mm

Preparation

Heating, sputtering

Sample environment

UHV

Special notes

In-vacuum fiducialization of sample using optical visible-light microscope; high-precision x-y stage; laser interferometer encoding

Scientific applications

Study of microstructures and interfaces in integrated circuits

Experimental techniques

MicroXPS, NEXAFS, MCD

Local contact

Name: Glenn Ackerman
Phone: (510) 486-7886
Fax: (510) 486-7696
Email: gdackerman@lbl.gov

Spokesperson

Name: Harry Fujimoto
Affiliation: Intel Corporation
Phone : (408) 765-2069
Fax: (408) 765-2940
Email: harry.h.fujimoto@intel.com