Operational

Now

Source characteristics

Bend magnet

Energy range

50 - 1000 eV

Monochromator

VLS-PGM

10¹¹ photons/s/0.01%BW at 100 eV

7000

Endstations

Scanning bright field and dark field mask inspection

Spot size at sample

4 x 6 µm

Local contact/spokesperson

Name: Jim H. Underwood
Affiliation: Center for X-Ray Optics, Berkeley Lab
Phone: (510) 486-4958
Fax: (510) 486-4550
Email: jhunderwood@lbl.gov