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About the ALS ALS in the News Partnership for Progress in Electronics Strengthened by New Lab-Industry Investment
About the ALS ALS in the News Partnership for Progress in Electronics Strengthened by New Lab-Industry Investment
| Partnership for Progress in Electronics Strengthened by New Lab-Industry Investment |
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| Monday, 05 December 2011 00:00 | |||
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Berkeley Lab and industry co-invest in new high-tech facilities and tools at the Advanced Light Source.
The MET5 microlithography tool at the Advanced Light Source’s beamline 12.0.1 will be housed in an enclosure inside a new clean room with wafer-processing facilities immediately adjacent, built by Berkeley Lab. The MET5 tool, funded by industry, incorporates a state-of-the-art, 8-nanometer optic.
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