LBNL Masthead A-Z IndexBerkeley Lab mastheadU.S. Department of Energy logoPhone BookJobsSearch
Partnership for Progress in Electronics Strengthened by New Lab-Industry Investment Print
Monday, 05 December 2011 00:00

Berkeley Lab and industry co-invest in new high-tech facilities and tools at the Advanced Light Source.

Read the News Release


The MET5 microlithography tool at the Advanced Light Source’s beamline 12.0.1 will be housed in an enclosure inside a new clean room with wafer-processing facilities immediately adjacent, built by Berkeley Lab. The MET5 tool, funded by industry, incorporates a state-of-the-art, 8-nanometer optic.